Examining microdevice. Fingers holding a micro- electromechanical system (MEMS) in front of an interference micrograph showing its structure. The micrograph, seen on a computer monitor, was produced using an interference microscope (surface profiler). MEMS are electrical and mechanical devices with micrometre-sized parts. They include miniature sensors or diagnostic devices. The surface features of this MEMS have been found to a vertical resolution of one tenth of a nanometre using white light interferometry, the pattern caused by the interaction of two waves of white light. Photographed in the Micromechanics Lab of Newcastle University, England.

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達志影像

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